About Materials Science Laboratory
Materials Science
- Development of new precursors for CVD.
- MOCVD of various materials such as carbides, nitrides, and oxides.
- Synthesis of large-area epitaxial thin films.
- Nanochemistry – nanoparticles, wiskers, nanowires, nanotubes.
- Plasma chemistry for CVD.
- Improvement of hard coating materials.
- PACVD of oxidation and corrosion protective coating.
- Plasma polymerization for biomedical application.
